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서미스터 소자로의 응용을 위한 솔-젤법으로 제작한 (La0.7Sr0.3)(Mn1-xFex)O3 박막의 구조적, 전기적 특성Structural and Electrical Properties of (La0.7Sr0.3)(Mn1-xFex)O3 Thin Films Prepared by Sol-Gel Method for Thermistor Devices

Other Titles
Structural and Electrical Properties of (La0.7Sr0.3)(Mn1-xFex)O3 Thin Films Prepared by Sol-Gel Method for Thermistor Devices
Authors
육지수이삼행이명규박주석김영곤이성갑
Issue Date
Mar-2024
Publisher
한국전기전자재료학회
Keywords
(La0.7Sr0.3)(Mn1-xFex)O3 films; Sol-gel method; Structural properties; Electrical properties; TCR; B-value
Citation
전기전자재료학회논문지, v.37, no.2, pp 164 - 168
Pages
5
Indexed
KCI
Journal Title
전기전자재료학회논문지
Volume
37
Number
2
Start Page
164
End Page
168
URI
https://scholarworks.gnu.ac.kr/handle/sw.gnu/69866
DOI
10.4313/JKEM.2024.37.2.6
ISSN
1226-7945
2288-3258
Abstract
(La0.7Sr0.3)(Mn1-xFex)O3 (LSMFO) (x = 0.03, 0.06, 0.09, 0.12) precursor solution are prepared by sol-gel method. LSMFO thin films are fabricated by the spin-coating method on Pt/Ti/SiO2/Si substrate, and the sintering temperature and time are 800℃ and 1 hr, respectively. The average thickness of the 6-times coated LSMFO films is about 181 to 190 nm and average grain size is about 18 to 20 nm. As the amount of Fe added in the LSMFO thin film increased, the resistivity decreased, and the TCR and B25/65-value increased. Electrical resistivity, TCR and B25/65-value of the (La0.7Sr0.3)(Mn0.88Fe0.12)O3 thin film are 0.0136 mΩ-cm, 0.358%/℃, and 328 K at room temperature, respectively. The resistivity properties of LSMFO thin films matched well with Mott’s VRH model.
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