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실리콘 표면에 질소 도핑된 DLC필름의 전기적 특성
- Authors
- 이치우
- Issue Date
- 10-Oct-2011
- Conference Name
- 한국기계가공학회 2011 추계학술대회 논문집
- Location
- 대한민국
- Conference Date
- 2011-10-10 ~ 2011-10-11
- metadata.conference.dc.citation.conferenceName
- 한국기계가공학회 2011 추계학술대회
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