Park, Jun Hong; Ribeiro, Mario; Pham, Thi Kim Hang; Lee, Nyun Jong; Eom, Tai-woon; Jo, Junhyeon; Park, Seung-Young; Rhim, Sonny H.; Nakamura, Kohji; Yoo, Jung-Woo, et al.
ArticleIssue Date2020CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.38, no.4PublisherAmerican Institute of Physics