Effect of Al Content on Structure and Properties of Ti1-xAlxN Hard Film Prepared by Multi-arc Ion Plating

초록

The compound technology of ion nitriding and multi-arc ion plating is adopted to make Ti1-xAlxN film on 40 Cr. The influence of Al content to the structure and functions of film is analyzed through SEM (Scanning Electron Telescope), XRD analyzer, micro hardness tester and scratch tester. It indicated that the Al content has obvious influence on the structure and function of film. The more Al content, the more droplets in the film. Phase structure tends to multiphase composite structures. The micro hardness and bonding force will be increased first, and then decreased with the rising Al content.

키워드