Dry-Transferred MoS2 Films on PET with Plasma Patterning for Full-Bridge Strain-Gauge Sensors

Abstract

In this study, a high-performance MoS2-based strain-gauge pressure was sensor fabricated entirely below 80 degrees C, enabling direct integration onto flexible polyethylene terephthalate (PET) substrates. The sensor comprised a three-layer MoS2 channel (similar to 2 nm) patterned via dry transfer and O-2/Ar plasma etching, interfaced with Cr/Au electrodes. This wafer-scale and cost-effective fabrication route preserves the crystallinity of the film and prevents substrate degradation. The sensor achieved a gauge factor of similar to 104 under compression, representing a fifty-fold improvement over conventional metal foil gauges (similar to 2), with a linear response across both compressive and tensile regimes. Mechanical robustness was confirmed through repeated bending and tape adhesion tests, with no degradation in electrical performance. When configured as a Wheatstone bridge, this device exhibits normalized sensitivity suitable for real-time monitoring, with response and recovery times below 200 ms. These results establish O-2/Ar-plasma-patterned MoS2 architectures as a scalable, cost-effective platform for next-generation flexible sensors, outperforming metal-foil technology in applications including seat-occupancy detection, wearable physiological monitoring, and tactile interfaces for soft robotics.