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스핀-코팅법으로 제작한 K(Ta,Nb)O3/Pb(Zr,Ti)O3 이종층 박막의 전기 열량 효과Electrocaloric Effect in Heterolayered K(Ta,Nb)O3/Pb(Zr,Ti)O3 Thin Films Fabricated by Spin-Coating Method

Other Titles
Electrocaloric Effect in Heterolayered K(Ta,Nb)O3/Pb(Zr,Ti)O3 Thin Films Fabricated by Spin-Coating Method
Authors
양영민육지수김지원이삼행박주석김영곤이성갑
Issue Date
2020
Publisher
한국전기전자재료학회
Keywords
Heterolayered; Electrocaloric effect; Sol-gel; Screen printing; Hysteresis
Citation
전기전자재료학회논문지, v.33, no.6, pp.465 - 470
Indexed
KCI
Journal Title
전기전자재료학회논문지
Volume
33
Number
6
Start Page
465
End Page
470
URI
https://scholarworks.bwise.kr/gnu/handle/sw.gnu/7476
DOI
10.4313/JKEM.2020.33.6.465
ISSN
1226-7945
Abstract
Heterolayered K(Ta,Nb)O3/Pb(Zr,Ti)O3 thin films on Pt/Ti/SiO2/Si substrates were prepared by a sol-gel process and spin-coating method. The structural and electrical properties were measured to investigate the possibility of application as an electrocaloric effect device. All specimens exhibited dense and uniform cross-sectional structures without pores, and the average thickness of the specimen coated six times was approximately 394 nm. Curie temperatures were observed at 5℃ or less in type-Ⅰ and 10℃ in type-Ⅱ specimens, respectively. Type-Ⅱ specimens coated 6 times showed a relative dielectric constant of 758 and remanent polarization of 9.71 μC/cm2 at room temperature. The maximum electrocaloric effect occurred between 20 and 25℃, slightly higher than their Curie temperature, and the electrocaloric property (ΔT) of the type-Ⅱ specimens coated 6 times was approximately 1.2℃ at room temperature.
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