비정형 기둥 형상을 가진 나노구조에서의 가스 투과성 실험 연구Permeability of the Lateral Air Flow through UnstructuredPillar-like Nanostructures
- Other Titles
- Permeability of the Lateral Air Flow through UnstructuredPillar-like Nanostructures
- Authors
- 김혜원; 임혜원; 박정우; 이상민; 김형모
- Issue Date
- Oct-2023
- Publisher
- 한국트라이볼로지학회
- Keywords
- 기체 제거; 가스 투과성; 비정형 나노구조물; 금속을 촉매로 한 화학적 식각 방법; Degassing; Gas permeability; Unstructure nanostructures; Metal assisted chemical etching
- Citation
- 한국트라이볼로지학회지, v.39, no.5, pp 197 - 202
- Pages
- 6
- Indexed
- KCI
- Journal Title
- 한국트라이볼로지학회지
- Volume
- 39
- Number
- 5
- Start Page
- 197
- End Page
- 202
- URI
- https://scholarworks.gnu.ac.kr/handle/sw.gnu/68916
- ISSN
- 2713-8011
- Abstract
- Recently, research on experimental and analytical techniques utilizing microfluidic devices has been pursued. For example, lab-on-a-chip devices that integrate micro-devices onto a single chip for processing small sample quantities have gained significant attention. However, during sample preparation, unnecessary gases can be introduced into the internal channels, thus, impeding device flow and compromising specific function efficiency, including that of analysis and separation. Several methods have been proposed to mitigate this issue, however, many involve cumbersome procedures or suffer from complexities owing to intricate structures. Recently, some approaches have been introduced that utilize hydrophobic device structures to remove gases within channels. In such cases, the permeability of gases passing through the structure becomes a crucial performance factor. In this study, a method involving the deposition and sintering of diluted Ag-ink onto a silicon wafer surface is presented. This is followed by unstructured nano-pattern creation using a Metal Assisted Chemical Etching (MACE) process, which yields a nanostructured surface with unstructured pillar shapes. Subsequently, gas permeability in the spaces formed by these surface structures is investigated. This is achieved by experiments conducted to incorporate a pressure chamber and measure gas permeability. Trends are subsequently analyzed by comparing the results with existing theories. Finally, it can be confirmed that the significance of this study primarily lies in its capability to effectively evaluate gas permeability through unstructured pillar-like nanostructures, thus, providing quantitative values for the appropriate driving pressure and expected gas removal time in practical device operation.
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