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슬랏 안테나 두께에 따른 원통형 TE11 선형 마이크로웨이브 플라즈마 특성 분석Electron Distribution of Cylindrical TE11 Wave Guide Type Linear Microwave Plasma Source according to Slot Antenna Thickness

Other Titles
Electron Distribution of Cylindrical TE11 Wave Guide Type Linear Microwave Plasma Source according to Slot Antenna Thickness
Authors
차주홍김상우정성현이호준
Issue Date
Dec-2023
Publisher
대한전기학회
Keywords
Plasma fluid simulation; PECVD; Microwave plasma; Linear MWP
Citation
전기학회논문지, v.72, no.12, pp 1670 - 1677
Pages
8
Indexed
SCOPUS
KCI
Journal Title
전기학회논문지
Volume
72
Number
12
Start Page
1670
End Page
1677
URI
https://scholarworks.gnu.ac.kr/handle/sw.gnu/68838
DOI
10.5370/KIEE.2023.72.12.1670
ISSN
1975-8359
2287-4364
Abstract
For the purpose of concentrating the plasma density in the deposition area, linear microwave plasma source which is based on circular TE11 wave mode has been developed. As the shape of a circular waveguide, it is filled with high permittivity dielectric. Microwave power at 2.45 GHz is transferred to the plasma through the continuous cylindrical slotted line antenna. It shows that the electron density in the deposition area is higher than that of the conventional quasi coaxial TEM plasma sources. However, due to the short wavelength compared to the equipment size, it has a non-uniform electric field distribution. In order to improve the uniformity problem, this research conducted the 3-D fluid model analysis based on linear microwave plasma source using Ar gas along the slot antenna thickness and process pressure. It was observed that the spatial uniformity of electron increases when the slot antenna thickness is optimized to 3mm, and the power transfer rate to the plasma is increased at 300mTorr.
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