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4H-SiC와 산화막 계면에 대한 혼합된 일산화질소 가스를 이용한 산화 후속 열처리 효과

김인규; 문정현

ArticleIssue Date2024Citation전기전자재료학회논문지, v.37, no.1, pp 101 - 105Publisher한국전기전자재료학회
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