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CSL-NOR형 SONOS 플래시 메모리의 멀티비트 적용에 관한 연구Investigation for Multi-bit per Cell on the CSL-NOR Type SONOS Flash Memories

Other Titles
Investigation for Multi-bit per Cell on the CSL-NOR Type SONOS Flash Memories
Authors
김주연김병철서광열안호명이명식
Issue Date
2005
Publisher
한국전기전자재료학회
Keywords
SONOS; NOR type flash memory; Common source line; Multi-bit; Charge pumping method; SONOS; NOR type flash memory; Common source line; Multi-bit; Charge pumping method
Citation
전기전자재료학회논문지, v.18, no.3, pp 193 - 198
Pages
6
Indexed
KCI
Journal Title
전기전자재료학회논문지
Volume
18
Number
3
Start Page
193
End Page
198
URI
https://scholarworks.gnu.ac.kr/handle/sw.gnu/29178
ISSN
1226-7945
2288-3258
Abstract
NOR type flash 32 x 32 array are fabricated by using the typical 0.35 ㎛ CMOS process. The structure of array is the NOR type with common source line. In this paper, optimized program and erase voltage conditions are presented to realize multi-bit per cell at the CSL-NOR array. These are considered selectivity of selected bit and disturbances of unselected bits. Retention characteristics of locally trapped-charges in the nitride layer are investigated. The lateral diffusion and vertical detrapping to the tunneling oxide of locally trapped charges as a function of retention time are investigated by using the charge pumping method. The results are directly shown by change of the trapped-charges quantities.
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융합기술공과대학 > Division of Converged Electronic Engineering > Journal Articles

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