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Effect of Al Content on Structure and Properties of Ti1-xAlxN Hard Film Prepared by Multi-arc Ion Plating

Authors
Lu, LongFeng, GuangguangRen, MinghaoZhang, HuixiaLyu, Sungki
Issue Date
Jan-2013
Publisher
KOREAN SOC PRECISION ENG
Keywords
Multi-arc ion plating; Ti1-xAlxN; Al content
Citation
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.14, no.1, pp 161 - 164
Pages
4
Indexed
SCIE
SCOPUS
KCI
Journal Title
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING
Volume
14
Number
1
Start Page
161
End Page
164
URI
https://scholarworks.gnu.ac.kr/handle/sw.gnu/20862
DOI
10.1007/s12541-013-0022-1
ISSN
2234-7593
2005-4602
Abstract
The compound technology of ion nitriding and multi-arc ion plating is adopted to make Ti1-xAlxN film on 40 Cr. The influence of Al content to the structure and functions of film is analyzed through SEM (Scanning Electron Telescope), XRD analyzer, micro hardness tester and scratch tester. It indicated that the Al content has obvious influence on the structure and function of film. The more Al content, the more droplets in the film. Phase structure tends to multiphase composite structures. The micro hardness and bonding force will be increased first, and then decreased with the rising Al content.
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공학계열 > 기계항공우주공학부 > Journal Articles

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