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서미스터로의 응용을 위한 La0.7Sr0.3MnO3 박막의 구조적, 전기적 특성Structural and Electrical Properties of La0.7Sr0.3MnO3 Thin Films for Thermistor Applications
- Other Titles
- Structural and Electrical Properties of La0.7Sr0.3MnO3 Thin Films for Thermistor Applications
- Issue Date
- Sep-2022
- Publisher
- 한국전기전자재료학회
- Keywords
- (La; Sr)MnO3; Thermistors; Hopping conduction; Structural properties; Electrical properties
- Citation
- 전기전자재료학회논문지, v.35, no.5, pp 499 - 503
- Pages
- 5
- Indexed
- KCI
- Journal Title
- 전기전자재료학회논문지
- Volume
- 35
- Number
- 5
- Start Page
- 499
- End Page
- 503
- ISSN
- 1226-7945
2288-3258
- Abstract
- La0.7Sr0.3MnO3 precursor solution were prepared by a sol-gel method. La0.7Sr0.3MnO3 thin films were fabricated by a spin-coating method on a Pt/Ti/SiO2/Si substrate. Structural and electrical properties with the variation of sintering temperature were measured. All specimens exhibited a polycrystalline orthorhombic crystal structure, and the average thickness of the specimens coated 6 times decreased from about 427 nm to 383 nm as the sintering temperature increased from 740℃ to 830℃. Electrical resistance decreased as the sintering temperature increased. In the La0.7Sr0.3MnO3 thin films sintered at 830℃, electrical resistivity, TCR, B-value, and activation energy were 0.0374 mΩ‧cm, 0.316%/℃, 296 K and 0.023 eV, respectively.
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