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Electrochemical properties of a Si3N4 dielectric layer deposited on anodic aluminum oxide for chemical sensorsopen access
- Authors
- Jo, Y.-W.; Lee, S.-G.; Yeo, J.-H.; Lee, D.-J.
- Issue Date
- 2016
- Publisher
- Korean Institute of Electrical and Electronic Material Engineers
- Keywords
- AAO; Chemical sensor; EDM
- Citation
- Transactions on Electrical and Electronic Materials, v.17, no.3, pp 159 - 162
- Pages
- 4
- Indexed
- SCOPUS
ESCI
KCI
- Journal Title
- Transactions on Electrical and Electronic Materials
- Volume
- 17
- Number
- 3
- Start Page
- 159
- End Page
- 162
- ISSN
- 1229-7607
2092-7592
- Abstract
- We studied an electrolyte-dielectric metal (EDM) device based on a Si3N4 layer-coated anodic aluminium oxide (AAO) template for chemical sensors. The AAO templates were fabricated using a two-step anodization procedure at 0°C and 70 V in 0.3 M oxalic acid, after which the Si3N4 was deposited on them using plasma enhanced chemical vapor deposition (PECVD). The average pore size was approximately 106 nm and the depth of the AAO templates was 24.6 nm to 86.5 nm. The Si3N4 layer-coated AAO is more stable than a single AAO template. ? 2016 KIEEME. All rights reserved.
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