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Low interface trap density in scaled bilayer gate oxides on 2D materials via nanofog low temperature atomic layer deposition

Kwak, Iljo; Kavrik, Mahmut; Park, Jun Hong; Grissom, Larry; Fruhberger, Bernd; Wong, Keith T.; Kang, Sean; Kummel, Andrew C.

ArticleIssue Date2019CitationApplied Surface Science, v.463, pp 758 - 766PublisherElsevier BV
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