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Controlled Surface Morphology and Electrical Properties of Sputtered Titanium Nitride Thin Film for Metal-Insulator-Metal Structuresopen access

Dongquoc, Viet; Seo, Dong-Bum; Anh, Cao Viet; Lee, Jae-Hyun; Park, Jun-Hong; Kim, Eui-Tae

ArticleIssue Date2022CitationApplied Sciences-basel, v.12, no.20PublisherMDPI
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