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서미스터로의 응용을 위한 La0.7Sr0.3MnO3 박막의 구조적, 전기적 특성
Structural and Electrical Properties of La0.7Sr0.3MnO3 Thin Films for Thermistor Applications
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- 박병준;
- 이삼행;
- 이명규;
- 박주석;
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- 외 2명
초록
La0.7Sr0.3MnO3 precursor solution were prepared by a sol-gel method. La0.7Sr0.3MnO3 thin films were fabricated by a spin-coating method on a Pt/Ti/SiO2/Si substrate. Structural and electrical properties with the variation of sintering temperature were measured. All specimens exhibited a polycrystalline orthorhombic crystal structure, and the average thickness of the specimens coated 6 times decreased from about 427 nm to 383 nm as the sintering temperature increased from 740℃ to 830℃. Electrical resistance decreased as the sintering temperature increased. In the La0.7Sr0.3MnO3 thin films sintered at 830℃, electrical resistivity, TCR, B-value, and activation energy were 0.0374 mΩ‧cm, 0.316%/℃, 296 K and 0.023 eV, respectively.
키워드
(La; Sr)MnO3; Thermistors; Hopping conduction; Structural properties; Electrical properties
- 제목
- 서미스터로의 응용을 위한 La0.7Sr0.3MnO3 박막의 구조적, 전기적 특성
- 제목 (타언어)
- Structural and Electrical Properties of La0.7Sr0.3MnO3 Thin Films for Thermistor Applications
- 저자
- 임정은; 박병준; 이삼행; 이명규; 박주석; 김병철; 김영곤; 이성갑
- 발행일
- 2022-09
- 저널명
- 전기전자재료학회논문지
- 권
- 35
- 호
- 5
- 페이지
- 499 ~ 503
- 언어
- KOR
- 출판사
- 한국전기전자재료학회
- 발행국가
- 대한민국
- 분량
- 5 페이지
- ISSN
- E 2288-3258
P 1226-7945