서미스터로의 응용을 위한 La0.7Sr0.3MnO3 박막의 구조적, 전기적 특성
Structural and Electrical Properties of La0.7Sr0.3MnO3 Thin Films for Thermistor Applications
  • 임정은
  • 박병준
  • 이삼행
  • 이명규
  • 박주석
  • ... 김병철
  • 외 2명

초록

La0.7Sr0.3MnO3 precursor solution were prepared by a sol-gel method. La0.7Sr0.3MnO3 thin films were fabricated by a spin-coating method on a Pt/Ti/SiO2/Si substrate. Structural and electrical properties with the variation of sintering temperature were measured. All specimens exhibited a polycrystalline orthorhombic crystal structure, and the average thickness of the specimens coated 6 times decreased from about 427 nm to 383 nm as the sintering temperature increased from 740℃ to 830℃. Electrical resistance decreased as the sintering temperature increased. In the La0.7Sr0.3MnO3 thin films sintered at 830℃, electrical resistivity, TCR, B-value, and activation energy were 0.0374 mΩ‧cm, 0.316%/℃, 296 K and 0.023 eV, respectively.

키워드

(LaSr)MnO3ThermistorsHopping conductionStructural propertiesElectrical properties
제목
서미스터로의 응용을 위한 La0.7Sr0.3MnO3 박막의 구조적, 전기적 특성
제목 (타언어)
Structural and Electrical Properties of La0.7Sr0.3MnO3 Thin Films for Thermistor Applications
저자
임정은박병준이삼행이명규박주석김병철김영곤이성갑
DOI
10.4313/JKEM.2022.35.5.12
발행일
2022-09
저널명
전기전자재료학회논문지
35
5
페이지
499 ~ 503