이온주입 제어에 의한 재료특성 개선에 관한 연구

A Study on Improvement of Material Characteristics by Control of Ion Implantation

초록

In this study, techniques of ion implantation were used in order to improve the characteristics of metal materials such as the oxidation and wear resistant. In particular it is necessary to develope their oxidation and wear resistant that could be used in severe environmental conditions. There are mainly two elementary technologies including ion implantation and/or thin film coating. Ion implantation method was performed for surface modification. As a result, it was found that some ion implantations methods such as Nb, high-temperature Nb ion implantation and Nb+C combined implantation are somewhat effective for improving the oxidation resistance of TiAl alloy. Furthermore, the fluorine PBII treatment is more effective for improving the oxidation resistance of the TiAl alloy with three-dimensional shapes. The implantation of boron ion into thin film of TiN was also effective for improving the properties of materials like high temperature wear resistance. TiCrN film was applied to the actual seal ring for steam turbines, and it was observed that its sliding property showed a successfully good performance.

키워드

Ion implantation(이온주입)Oxidation resistant(내산화성)Wear resistant(내마모성)PBII(plasma-based ion implantation)Surface treatment(표면처리)Thin film coating(박막코팅)
제목
이온주입 제어에 의한 재료특성 개선에 관한 연구
제목 (타언어)
A Study on Improvement of Material Characteristics by Control of Ion Implantation
저자
양영준후지타 카즈히사이치우
발행일
2008
저널명
한국마린엔지니어링학회지
32
8
페이지
1178 ~ 1184