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Analysis on the interface traps and their energy didtribution for tunnel oxide degradation in 3D NAND array by using charge pumping technique
- 제목
- Analysis on the interface traps and their energy didtribution for tunnel oxide degradation in 3D NAND array by using charge pumping technique
- 저자
- 김병철
- 발행일
- 2012-08-28
- 학회명
- IUMRS-ICA 2012
- 개최국가
- 대한민국