Nonlocal nonlinear modeling of multilayer circular graphene sheets embedded in NEMS transducers incorporating interlayer shear effect

초록

This study addresses a critical gap in modeling nanoplates in nanoelectromechanical systems (NEMS) by developing a nonlinear nonlocal model for multilayer graphene sheet (MLGS)-based capacitive electromechanical system that accounts for nonlocal compatibility equation. The proposed framework covers both Cartesian and polar geometries useful for various NEMS designs, incorporating initial tensile stress, interlayer shear effect (ISE), geometrical nonlinearity and nonlocality into the equations. As a semi-analytical approach, the single-mode Galerkin method using a precise basis function was employed to derive the nonlinear equation of motion for the circular nanoplate. Additionally, the finite element method (FEM) via weak form representation was utilized to solve the governing partial differential equations for the nanoplate's eigenfrequencies and electrostatic displacements. A comprehensive study of design parameters was conducted, demonstrating that the continuum model and FEM results are in excellent agreement. Subsequently, the derived nonlinear equation was used to investigate the influence of all physical and geometrical parameters on voltage-displacement curves (VDCs) and frequency-voltage curves (FVCs). Results indicate that the coupling of ISE with geometrical nonlinearity significantly shifts the resonant frequencies and pull-in instability thresholds. This work offers a refined mathematical foundation for the precise modeling of MLGS-based MEMS/NEMS such as microphones and pressure sensors. © 2026 Elsevier Ltd

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