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초록
Most of the MEMS parts are made of multi-grain silicon wafer, which is the orthotropic material and its material direction is arbitrary. The reliability of the parts must be guaranteed in order to use for the commercial usage. The need of the structural analysis of its parts emerges an important factor. The material properties of the MEMS parts are calculated by the numerical method in order to reduce a material test. In this study, the effective elastic modulus and its Poisson’s ratio are calculated by the boundary element method(BEM) and are compared with the results by the finite element method(FEM)
키워드
다결정; 직교이방성; 유효탄성계수; 유효 푸아송비; 경계요소법; Multi-Grain; Orthotropic; Effective Elastic Modulus; Effective Poisson`s Ratio; Boundary Element Method
- 제목
- 경계요소법에 의한 다결정 직교 이방성 재료의 유효 재료 상수의 계산
- 제목 (타언어)
- Calculation of Effective Material Property for Multi-Grain Orthotropic Material by BEM
- 저자
- 이석순; 김동은; 이상훈; 정일중
- 발행일
- 2008
- 저널명
- 대한기계학회논문집 A
- 권
- 32
- 호
- 9
- 페이지
- 713 ~ 719
- 언어
- KOR
- 출판사
- 대한기계학회
- 발행국가
- 대한민국
- 분량
- 7 페이지
- ISSN
- E 2288-5226
P 1226-4873