레이저 가공을 위한 베셀 빔 스캐닝 광학계 설계

Abstract

The focus formed by the Bessel beam has a longer depth of focus than the focus formed by the existingGaussian beam, and also forms a uniform intensity profile in the long depth of focus area. Therefore, inlaser processing technology using Bessel beams, groundbreaking results can be achieved in the 3D laserprocessing area that requires processing in the depth direction. In this document, we proposed an opticallayout that has a compact layout and can be combined with a high-speed scanning mirror to effectivelyimplement laser processing in laser processing technology using Bessel beams. The performance of thedesigned optical system was verified by calculating the angle and height of the ray passing through theExicon lens through ray tracing simulation. The designed optical system has a compact size and is expectedto be easy to use in processing sites such as vacuum atmospheres. Additionally, it can be used as aneffective surface processing technique when combined with a high-speed scanning mirror.