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Effect of Si cluster incorporation on properties of microcrystalline silicon thin films
- Authors
- 양정현
- Issue Date
- 18-Nov-2016
- Publisher
- (사)한국표면공학회
- Citation
- 2016년도 한국표면공학회 추계학술대회, pp.181
- Conference Name
- 2016년도 한국표면공학회 추계학술대회
- Place
- KO
한양대학교 ERICA 캠퍼스
- Conference Date
- 2016-11-17
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Collections - 해양과학대학 > 기계시스템공학과 > Conference Papers
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