수열합성법으로 제조된 Co_3O_4 분말을 사용한 후막 가스센서의 가스감지 특성

Abstract

Co_3O_4 thick film gas sensor using the powder prepared by hydrothermal reaction method(HRM) was fabricated. For comparison study, we also prepared the sensor using commercial Co_3O_4 powder under the same fabrication conditions. Sensitivity, time response, and selectivity of them to variable gases such as iso-C_4H_(10), CO, NH_3, and CH_4 were investigated. The sensor from the powder prepared by HRM showed higher sensitivity to every gas than those from commercial powder. For iso-C_4H_(10) gas, the sensitivities of both sensor to 100 ppm are 160 % and 40 %, respectively. Time response and selectivity of the sensor using the powder prepared by HRM were better than those of the sensor using commercial powder.