루츠타입 진공펌프 동특성의 해석적 평가

Abstract

The goal of this study is the stability evaluation of a vacuum pump through modal test and rotor dynamics. Roots type vacuum pump, which is a dry vacuum pump, is necessary for the manufacturing process of the semiconductor and the display. Eigenvalue was solved by the finite-element method(FEM) using 2D and 3D models, then the modal test result was compared with the FEM result. According to the comparison, the analysis result using the 2D was more accurate than the 3D model. Therefore, rotor dynamics was performed by the 2D model. Campbell diagram and root-locus maps, which were calculated by complex-eigenvalue analysis, were used to evaluate the stability of the rotors of the vacuum pump. And displacement solved by unbalance response analysis was compared with the minimum clearance between two rotors of the vacuum pump. Thus, the vacuum pump is assumed operated under steady state through the evaluation of the rotor dynamics.