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Cited 2 time in webofscience Cited 3 time in scopus
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Characterization of Anodic Aluminum Oxide Membrane with Variation of Crystallizing Temperature for pH Sensor

Authors
Yeo, Jin-HoLee, Sung-GapJo, Ye-WonJung, Hye-Rin
Issue Date
Nov-2015
Publisher
AMER SCIENTIFIC PUBLISHERS
Keywords
Anodic Aluminum Oxide; pH Sensor; EDM
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.15, no.11, pp 8642 - 8646
Pages
5
Indexed
SCI
SCIE
SCOPUS
Journal Title
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume
15
Number
11
Start Page
8642
End Page
8646
URI
https://scholarworks.gnu.ac.kr/handle/sw.gnu/16955
ISSN
1533-4880
1533-4899
Abstract
We fabricated electrolyte-dielectric-metal (EDM) device incorporating a high-k Al2O3 sensing membrane from a porous anodic aluminum oxide (AAO) using a two step anodizing process for pH sensors. In order to change the properties of the AAO template, the crystallizing temperature was varied from 400 degrees C to 700 degrees C over 2 hours. The structural properties were observed by field emission scanning electron microscopy (FE-SEM). The pH sensitivity increased with an increase in the crystallizing temperature from 400 degrees C to 600 degrees C. However at 700 degrees C, deformation occurred. The porous AAO sensor with a crystallizing temperature of 600 degrees C displayed the good sensitivity and long-term stability and the values were 55.7 mV/pH and 0.16 mV/h, respectively.
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