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Characteristics of segmented dielectric window inductively coupled plasmaopen access

Kim, Sang-Woo; Cha, Ju-Hong; Juing, Sung-Hyeon; Shim, SeungBo; Kim, Chang Ho; Lee, Ho-Jun

ArticleIssue Date2023CitationAIP Advances, v.13, no.4PublisherAmerican Institute of Physics Inc.
SCIESCOPUS
Thermal effects on plasma characteristics in inductively coupled Ar/O2 discharges: a fluid simulation approach

Kim, Sang-Woo; Cha, Ju-Hong; Lee, Ho-Jun

ArticleIssue Date2025CitationJournal of Physics D: Applied Physics, v.58, no.42PublisherIOP Publishing Ltd.
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