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Growth of 2-Inch α-Ga<sub>2</sub>O<sub>3</sub> Epilayers via Rear-Flow-Controlled Mist Chemical Vapor Depositionopen access

Kim, Kyoung-Ho; Ha, Minh-Tan; Kwon, Yong-Jin; Lee, Heesoo; Jeong, Seong-Min; Bae, Si-Young

ArticleIssue Date2019CitationECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, v.8, no.7PublisherELECTROCHEMICAL SOC INC
SCIESCOPUS
Understanding Thickness Uniformity of Ga<sub>2</sub>O<sub>3</sub> Thin Films Grown by Mist Chemical Vapor Deposition

Minh-Tan Ha; Kim, Kyoung-Ho; Kwon, Yong-Jin; Kim, Cheol-Jin; Jeong, Seong-Min; Bae, Si-Young

ArticleIssue Date2019CitationECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, v.8, no.7, pp Q3206 - Q3212PublisherELECTROCHEMICAL SOC INC
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