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Development and Electrical Properties of (Ca0.7Sr0.3) (Zr0.8Ti0.2)O-3 Thin Film Applied to Embedded Decoupling Capacitors

Lee, Seung-Hwan; Kim, Hong-Ki; Kang, Min-Gyu; Kang, Chong-Yun; Lee, Sung-Gap; Lee, Young-Hie; Yoon, Jung-Rag

ArticleIssue Date2014CitationIEEE ELECTRON DEVICE LETTERS, v.35, no.7, pp 777 - 779PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
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