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Dynamics of Plasma-Assisted Epitaxial Silicon Growth Driven by a Hydrogen-Incorporated Nanostructure for Novel Applications

Oh, Joon-Ho; Lee, Tae Kyung; Kim, Ryoon Young; An, Jeong-Ho; Mo, Sung-In; Hong, Ji-Eun; Kim, Sun-Wook; Keum, Min Jong; Song, Hee-eun; Kim, Ka-Hyun

ArticleIssue Date2024CitationSmall Structures, v.5, no.2PublisherWILEY
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