Khan, Shakir-ul Haque; Banerjee, Aishwaryadev; Broadbent, Samuel; Noh, Seungbeom; Kim, Kyeong Heon; Bulbul, Ashrafuzzaman; Looper, Ryan E.; Mastrangelo, Carlos H.; Kim, Hanseup
ArticleIssue Date2022CitationJournal of Microelectromechanical Systems, v.31, no.5, pp 791 - 801PublisherInstitute of Electrical and Electronics Engineers