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레이저-FIB 연계 가공 공정의 레이저 빔 입사각 최적화 및 통합 시스템 설계

하정홍; 송규; 최현; 김충수; 고종완; 장동영

ArticleIssue Date2025Citation한국정밀공학회지, v.42, no.7, pp 529 - 536Publisher한국정밀공학회

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